Fabrication of TiO2-Organic Hybrid Dot Arrays Using Nanosecond Laser Interference Lithography

Laser interference lithography is an established fabrication technique for periodic arrays such as photonic crystals (PCs). In this paper, we report the fabrication of a TiO2-organic hybrid periodic array by nanosecond laser interference lithography. TiO2organic hybrid films were prepared from titanium tetra-n-butoxide and 2-(methacryloyloxy) ethyl acetoacetate (MEAcAc) by the sol–gel method. The films were irradiated by using 10 ns pulses of 355 nm diffracted light from a Nd:yttrium–aluminum– garnet laser. The complexes formed by the Ti alkoxide and the MEAcAc were decomposed by laser irradiation, and the irradiated parts remained as periodic dot arrays on the substrate after the development. The two-dimensional array of this TiO2organic hybrid material was calcined at 4501C and formed an anatase TiO2 dot array. The refractive index measured was 2.00. These dots were crack free and adherent to the substrate.